PhD: Patterning of 2D materials by EUV light and area-selective processing

Are you fascinated by the miniaturization of electronic structures and how that enables a range of other technologies from mobile communication to artificial intelligence? And do you want to contribute to the development of novel patterning schemes in collaboration with ASML?

Position PhD-student

Irène Curie Fellowship No

Department(s) Applied Physics and Science Education

FTE 1,0

Date off 10/09/2024

Reference number V34.7632

Job description

Research

The goal of this PhD project is to work towards a new paradigm of resist-free patterning of 2D materials such as MoS2 and WS2. 2D transition metal dichalcogenides (TMDs) will play a central role in scaling nanoelectronics beyond silicon limits. In order to integrate 2D TMDs in ultra-scaled CMOS devices, developing a patterning technology via state-of-the-art extreme ultraviolet (EUV) lithography is essential, however this comes with a new set of challenges related to the ultra-thin body of these layers.

In this pathfinding project, approaches for resist-free patterning will be developed by uniting area-selective processing technology and EUV lithography. Area-selective deposition (ASD), etching and modification of 2D TMDs will be achieved using state-of-the-art atomic layer deposition (ALD) and atomic layer etching (ALE) techniques. Please see for more information: https://spie.org/advanced-lithography/presentation/Advanced-EUV-patterning-of-2D-TMDs-for-CMOS-integration/12956-47  and https://pubs.acs.org/doi/10.1021/acs.chemmater.8b03454

Project & Job description

We are looking for a PhD student who is interested in performing experimental studies towards the development of resist-free patterning. A variety of experimental techniques will be employed to obtain insights into the growth and the surface chemistry such as in-situ ellipsometry and Fourier transform infrared spectroscopy. The impact of surface modification using EUV patterning and ALD/ALE will be studied for different materials. The experimental studies will be complemented with theoretical studies together with other project members. The project will be carried out in strong collaboration with ASML.

Location

The work will be performed in the group Plasma & Materials Processing and in the NanoLab cleanroom at the Department of Applied Physics at the TU/e. The PMP group focuses on the advancement of the science and technology of plasma and materials processing, a research area which is in essence multidisciplinary and encompasses the research fields of plasma physics, surface science, and materials science. The scientific objective of the group is to obtain “atomic” level understanding of the interaction of plasmas and gases with materials.

Job requirements

Qualifications:

For this PhD position, we are looking for a highly talented, enthusiastic, and exceptionally motivated candidate with MSc degree (or equivalent) in (Applied) Physics, Chemistry, Chemical Engineering, Material Science, Electrical Engineering, or similar. The candidate must have a strong background in either physics or chemistry. Experience in the areas of patterning, surface science or thin film deposition would be an asset. To facilitate the collaboration within the project, the candidate should have interest in device fabrication schemes. Good communication skills in English (both written and spoken) are required.

Responsibilities and tasks:

• Investigation of the interaction of photons, electrons, and plasmas with 2D materials using in-situ techniques.
• Development of area-selective processes, analysis of the deposited films, and demonstration of the selectivity.
• Report results to collaborators, preparation of scientific papers and conference presentations.
• Daily supervision of BSc, and MSc students.

Job Requirements

• MSc degree in (Applied) Physics, Chemistry, Chemical Engineering, Material Science, Electrical Engineering, or a comparable domain.
• Excellent mastering of the English language, good communication skills. Note that there is no Dutch language requirement.
• Be a team player and able to work in a dynamic, interdisciplinary context.

Conditions of employment

A meaningful job in a dynamic and ambitious university, in an interdisciplinary setting and within an international network. You will work on a beautiful, green campus within walking distance of the central train station. In addition, we offer you:

• Full-time employment for four years, with an intermediate evaluation (go/no-go) after nine months. You will spend 10% of your employment on teaching tasks.
• Salary and benefits (such as a pension scheme, paid pregnancy and maternity leave, partially paid parental leave) in accordance with the Collective Labour Agreement for Dutch Universities, scale P (min. €2,770 max. €3,539).
• A year-end bonus of 8.3% and annual vacation pay of 8%.
• High-quality training programs and other support to grow into a self-aware, autonomous scientific researcher. At TU/e we challenge you to take charge of your own learning process.
• An excellent technical infrastructure, on-campus children's day care and sports facilities.
• An allowance for commuting, working from home and internet costs.
• A Staff Immigration Team and a tax compensation scheme (the 30% facility) for international candidates.

Information and application

About us

Eindhoven University of Technology is an internationally top-ranking university in the Netherlands that combines scientific curiosity with a hands-on attitude. Our spirit of collaboration translates into an open culture and a top-five position in collaborating with advanced industries. Fundamental knowledge enables us to design solutions for the highly complex problems of today and tomorrow. 
 

Curious to hear more about what it’s like as a PhD candidate at TU/e? Please view the video.

Information

Do you recognize yourself in this profile and would you like to know more?
Please contact the hiring manager dr.ir. A. Mackus, email a.j.m.mackus@tue.nl.

Visit our website for more information about the application process or the conditions of employment. You can also contact HR Services, email HRServices.Flux@tue.nl.

Are you inspired and would like to know more about working at TU/e? Please visit our career page.

Application

We invite you to submit a complete application by using the apply button.
The application should include a:

• A cover letter explaining your motivation and qualifications for the position. Please describe in a separate paragraph why you are specifically interested in this project.
• A detailed CV.
• A list of publications anhd conference contributions.
• Names and contact information of two or more references.

Screening of applications will start as soon as applications are received and will continue until the position has been filled.

We look forward to receiving your application